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無塵室及微污染介紹

Cleanroom is a facility in which the air supply, air distribution, filtration of air supply, material of construction,
and operating procedures are regulated to control airborne particle concentration to meet appropriate
cleanliness levels defined by ISO 14644 (Formerly Federal Standard 209E).
無塵室是指將室內空氣過濾，並將氣流分佈、操作過程中空氣的顆粒物濃度控制在無塵標準範圍
內的設施。通過 ISO 14644 中定義的（原聯邦標準 209E）。

CLEANROOM CLASSES – Standard Comparison 無塵室等級 – 標準對照

ISO Maximum concentration limits (particles/m of air) for particles Approx. Equivalent Approx. Equivalent
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Classification equal to and larger than sizers shown below 大於或等於表中 Fed. Std 209E 大約 Fed. Std 209D 大約相
Number 級 粒徑的最大濃度限值 相當於聯邦標准 當於聯邦標準
別序號 209E 209D
0.1 µm 0.2 µm 0.3 µm 0.5 µm 1.0 µm 5.0 µm
ISO Class 1 10 2
ISO Class 2 100 24 10 4
ISO Class 3 1,000 237 102 35 8 M1.5 Class 1
ISO Class 4 10,000 2,370 1,020 352 83 M2.5 Class 10
ISO Class 5 100,000 23,700 10,200 3,520 832 29 M3.5 Class 100
ISO Class 6 1,000,000 237,000 102,000 35,200 8,320 293 M4.5 Class 1,000
ISO Class 7 352,000 83,200 2,930 M5.5 Class 10,000
ISO Class 8 3,520,000 832,000 29,300 M6.5 Class 100,000
ISO Class 9 35,200,000 8,320,000 293,000 M7.5

Controlled Manufactured Areas 生產控制區域

Classification 類別 Typical Applications 應用範圍
Pharmaceuticals 醫藥
Controlled Environments Research Laboratories 研發實驗室
控制環境 Food Grade Equipment 食品級設備

Printed Circuit Boards 印刷電路板
Class 100,000 to 10,000 Precision Metering Equipment 精密計量設備
等級 100,000 至 10,000 Pharmaceutical Fluids 液體藥物

Electronic Components 電子元件
Class 10,000 to 1,000 Medical Devices 醫療機械
等級 10,000 至 1,000
Floppy Disks 軟碟
Optics 光學器件
Class 100 to 10 Disk Drives 磁碟機
等級 100 至 10 Semiconductor Networks 半導體網路

Semiconductor Fabrication 半導體製造
Class 10 to 1 Thin Film Manipulation 薄膜處理
等級 10 至 1 Flat Panel Displays 平板顯示器

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