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Wafer Handling System
晶圓處理系統
The use of clean organic materials, patented vacuum tip design and true ESD protection provides a unique system with the highest
levels of cleanliness and safety.
All parts of Vacuum Handling System are interchangeable. They can be configured or upgraded to meet the specific end-user
requirements.
晶圓處理系統使用無塵有機材料,具有專利權的真空頭設計,真正起到防靜電保護的獨特系統,
達到清潔和安全保護的 最高水準。
真空處理系統的所有配件都可以互換。它們可以設定或升級,以滿足特定用戶的要求。
• Manual solution for single wafer handling » 手動單晶圓的解決方案
• True ESD protection » 真正起到防靜電保護作用
• High impedance range (SD) » 高阻抗範圍 (SD)
• Manufactured from clean organic materials » 由無塵有機材料製成
• Unique surface treatment provides roughness (0.3µm) » 獨特的表面處理減輕了粗糙度(0.3µ 米)
• Optical polishing of vacuum surface » 真空表面,光學拋光
• Vacuum wand normally open » 常通吸筆
• Patented raised vacuum surface to minimize contact » 專有花紋真空表面減少了摩擦
• Patented support ribs prevent wafer deformation » 專有支撐設計防止晶片變形
• Reinforced vacuum tube prevents vacuum loss » 堅固的真空管防止真空洩漏
Product code/ 產品代碼 Description / 描述 Specifications / 規格
DYC950-02-EI14 EP-0 Peek tip for up to 5” wafers PEEK + CF
DYC950-02-EI14 EP-30 Peek tip for up to 5” wafers, Ext 30 degree PEEK +CF
DYC950-02-EI30 EP-0 Peek tip for up to 8” wafers PEEK +CF
DYC950-02-EI30 EP-30 Peek tip for up to 8” wafers, , Ext 30 degree PEEK +CF
DYC950-02-EI50 EP-0 Peek tip for up to 12” wafers PEEK +CF
DYC950-02-SPCV Vertical Wand Stand PVDF
DYC950-02-VSNO-SD Normally Open Wand PVDF + CF
DYC950-02-CTS-SD-1/4SD Coiled Vacuum Tube, ESD Polyurethane
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